Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Van Den Broeke, Douglas J."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Double dipole lithography for 65-nm node and beyond: a technology readiness review

    Hsu, Stephen
    ;
    Eurlings, Mark
    ;
    Hendrickx, Eric  
    ;
    Van Den Broeke, Douglas J.
    ;
    Chiou, Tsann-Bim
    Proceedings paper
    2004-08, Photomask and Next-Generation Lithography Mask Technology XI, 14/04/2004, p.481-498

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings