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Browsing by Author "Van Deun, R."

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    Enhancement of active phosphorus concentration in Ge CVD layers in view of group-IV optical interconnections using low temperature in-situ doping and high order Ge precursors

    Shimura, Yosuke
    ;
    Srinivasan, Ashwyn  
    ;
    Van Thourhout, Dries  
    ;
    Van Deun, R.
    ;
    Pantouvaki, Marianna  
    Proceedings paper
    2015, International Symposium on EcoTopia Science - ISETS, 27/11/2015

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