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Enhancement of active phosphorus concentration in Ge CVD layers in view of group-IV optical interconnections using low temperature in-situ doping and high order Ge precursors
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1751 since deposited on 2021-10-22
2last month
Acq. date: 2025-12-15
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1751 since deposited on 2021-10-22
2last month
Acq. date: 2025-12-15
Citations