Browsing by Author "Van Dijk, A."
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Publication Full-field EUV and immersion lithography integration in 0.186μm² FinFET 6T-SRAM cell
Proceedings paper2008, Technical Digest International Electron Devices Meeting - IEDM, 15/12/2008, p.861-864Publication Imaging performance of the EUV alpha demo tool at IMEC
Proceedings paper2008, Emerging Lithographic Technologies XII, 24/02/2008, p.69210O