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Browsing by Author "Van Dommelen, Youri"

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    Litho and patterning challenges for memory and logic applications at the 22nm node

    Finders, Jo
    ;
    Dusa, Mircea  
    ;
    Nikolsky, Peter
    ;
    Van Dommelen, Youri
    ;
    Watso, Robert
    ;
    Vandeweyer, Tom  
    Proceedings paper
    2010, Optical Microlithography XXIII, 21/02/2010, p.76400C

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