Browsing by Author "Van Herp, Bart"
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Publication Determination of degradation products in O3/DI processes
Oral presentation2001, 15th World Congress of the International Ozone Association; 10-15 September 2001; London, UK.Publication Determination of photoresist degradation products in O3/DI water processing
; ; Proceedings paper2001, Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS, 18/09/2000, p.207-210Publication Removal of photoresist by O3DI water processes: determination of degradation products
Proceedings paper2002, Cleaning Technology in Semiconductor Device Manufacturing VII, 4/09/2001, p.77-84Publication Removal of photoresist by O3DI water processes: determination of degradation products
Meeting abstract2001, 200th Meeting of the Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device Manufac, 2/09/2001