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Removal of photoresist by O3DI water processes: determination of degradation products
Publication:
Removal of photoresist by O3DI water processes: determination of degradation products
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Date
2002
Proceedings Paper
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6142.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vankerckhoven, Hans
;
De Smedt, Frank
;
Vinckier, Chris
;
Van Herp, Bart
;
Claes, Martine
;
De Gendt, Stefan
;
Heyns, Marc
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1986
since deposited on 2021-10-14
Acq. date: 2025-12-12
Citations
Metrics
Views
1986
since deposited on 2021-10-14
Acq. date: 2025-12-12
Citations