Browsing by Author "Van Houtte, Paul"
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Publication Study of stress evolution during full silicidation for gate stacks
Proceedings paper2005-05, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.249-256Publication Thermomechanical properties of nickel silicide: dependence on the microstructure
Proceedings paper2005, Textures of Materials - ICOTOM 14, 11/07/2005, p.1431-1436