Browsing by Author "Van Peski, C."
Now showing 1 - 4 of 4
- Results Per Page
- Sort Options
Publication Hard pellicle investigation for 157 nm lithography: impact on overlay
Proceedings paper2004, 20th European Mask Conference on Mask Technology for Integrated Circuits and Microcomponents, 12/01/2004, p.1-11Publication Initial assessment of the impact of a hard pellicle on imaging using a 193 nm step-and-scan system
Journal article2004, Journal of Microlithography, Microfabrication and Microsystems, (3) 2, p.239-262Publication Initial assessment of the lithographic impact of the use of a hard pellicle on wafer distortion
Proceedings paper2004, Optical Microlithography XVII, 22/02/2004, p.1679-1688Publication Initial assessment of the lithographic impact of the use of hard pellicles : an overview
Proceedings paper2004, Optical Microlithography XVII, 22/02/2004, p.116-123