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Browsing by Author "Van Schravendijk, Bart"

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    Integrated approach to improving local CD uniformity in EUV patterning

    Liang, Andrew
    ;
    Hermans, Jan  
    ;
    Tran, Tim
    ;
    Viatkina, Katja
    ;
    Liang, Chen-Wei
    ;
    Ward, Brandon
    Proceedings paper
    2017, Extreme Ultraviolet (EUV) Lithography VIII, 26/02/2017, p.1014319

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