Browsing by Author "Vander Meeren, Hans"
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Publication Deposition of SBT and PZT thin films for FERAM application
Oral presentation2001, Workshop: Journées des Couches Ferroelectrectriques - JCF; 26-27 November 2001; Maubeuge, France.Publication Effects of voltage cycling on polarization and reliability of 3D SBT ferroelectric capacitors integrated in 0.18um CMOS technology
Proceedings paper2005, Extended Abstracts of the International Conference on Solid State Devices and Materials, 12/09/2005, p.640-641Publication Enhanced oxidation of TiAIN barriers integrated in three dimensional ferroelectric capacitor structures
Journal article2007-01, Journal of Applied Physics, (101) 1, p.14908Publication MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes