Browsing by Author "Vankerckhoven, H."
Now showing 1 - 4 of 4
- Results Per Page
- Sort Options
Publication Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?
Proceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.215-219Publication Determination of photoresist degradation products in O-3/DI processing
Journal article2002, Ozone Science and Engineering, (24) 5, p.391-398Publication Effect of additives on the removal efficiency of photoresist by ozone/Di-water processes; experimental study
; ; ; Vinckier, ChrisProceedings paper2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.101-105Publication The increasing importance of the use of ozone in the microelectronics industry
Journal article2002, Ozone Science and Engineering, (24) 5, p.379-390