Browsing by Author "Vanneer, Roel"
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Publication 11-Megapixel CMOS-integrated SiGe micromirror arrays for high-end applications
Journal article2010, Journal of Microelectromechanical Systems, (19) 1, p.202-214Publication Packaging of 11MPixel CMOS-integrated SiGe micro-mirror arrays
Proceedings paper2009, 22nd International IEEE Conference on Micro Electro Mechanical Systems - MEMS, 25/01/2009, p.136-139Publication SLM device for 193 nm lithographic applications