Publication:

Packaging of 11MPixel CMOS-integrated SiGe micro-mirror arrays

Date

2009

Proceedings Paper

Simple item page Full metadata Statistics

Files

16851.pdf 4.41 MB

Author(s)

;

Tilmans, Harrie

;

Bogaerts, Lieve

;

;

;

;

Haspeslagh, Luc

;

Schlatmann, Bart

;

van Bommel, Mark

;

de Nooijer, Christine

;

;

;

van Drieenhuizen, Bert

Metrics

1989 since deposited on 2021-10-18

Acq. date: 2025-12-10