Publication:

Packaging of 11MPixel CMOS-integrated SiGe micro-mirror arrays

Date

2009
Proceedings Paper
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16851.pdf 4.41 MB

Author(s)

Witvrouw, Ann
;
Tilmans, Harrie  
;
Bogaerts, Lieve  
;
De Moor, Piet  
;
Bearda, Twan
;
Halder, Sandip  
;
Haspeslagh, Luc  
;
Schlatmann, Bart
;
van Bommel, Mark
;
de Nooijer, Christine  
;
Lauria, John
;
Vanneer, Roel
;
van Drieenhuizen, Bert

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Abstract

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1984 since deposited on 2021-10-18
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