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Browsing by Author "Vannuffel, Cyril"

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    Microstepper vs. interference EUV lithography: effects on resist profiles

    Gronheid, Roel  
    ;
    Van Roey, Frieda  
    ;
    Goethals, Mieke
    ;
    Solak, Harun H.
    ;
    Ekinci, Yasin
    Proceedings paper
    2005, 4th International Symposium on EUV Lithography, 7/11/2005

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