Browsing by Author "Vaquette, Quentin"
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Publication Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope
Meeting abstract2009, 35th International Conference on Micro & Nano Engineering - MNE, 28/09/2009Publication Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope
Journal article2010, Microelectronic Engineering, (87) 5_8, p.1410-1412