Browsing by Author "Vasil'eva, A."
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Publication Modification of OSG based low-k films under EUV and VUV exposure
;Rakhimova, T. ;Rakhimov, A. ;Mankelevich, Y. ;Lopaev, D. ;Kovalev, A. ;Vasil'eva, A.Proshina, O.Journal article2013, Applied Physics Letters, 102, p.111902