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Browsing by Author "Veltens, T."

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    Removal of nano-particles by mixed-fluid jet: evaluation of cleaning performance and comparison with megasonic

    Vereecke, Guy  
    ;
    Veltens, T.
    ;
    Eitoku, A.
    ;
    Sano, Ken-Ichi
    ;
    Doumen, Geert  
    ;
    Fyen, Wim
    ;
    Wostyn, Kurt  
    Proceedings paper
    2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.193-196

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