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Removal of nano-particles by mixed-fluid jet: evaluation of cleaning performance and comparison with megasonic
Publication:
Removal of nano-particles by mixed-fluid jet: evaluation of cleaning performance and comparison with megasonic
Date
2008
Proceedings Paper
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15559.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vereecke, Guy
;
Veltens, T.
;
Eitoku, A.
;
Sano, Ken-Ichi
;
Doumen, Geert
;
Fyen, Wim
;
Wostyn, Kurt
;
Snow, J.
;
Mertens, Paul
Journal
Abstract
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1916
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1916
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations