Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Veltens, Tom"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Evaluation of megasonic cleaning systems for particle removal efficiency and damaging

    Vereecke, Guy  
    ;
    Holsteyns, Frank  
    ;
    Veltens, Tom
    ;
    Lux, Marcel  
    ;
    Arnauts, Sophia  
    ;
    Kenis, Karine  
    Proceedings paper
    2004, Cleaning Technology in Semiconductor Device Manufacturing VIII. Proceedings of the International Symposium, 13/10/2003, p.145-152

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings