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Evaluation of megasonic cleaning systems for particle removal efficiency and damaging
Publication:
Evaluation of megasonic cleaning systems for particle removal efficiency and damaging
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Date
2004
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vereecke, Guy
;
Holsteyns, Frank
;
Veltens, Tom
;
Lux, Marcel
;
Arnauts, Sophia
;
Kenis, Karine
;
Vos, Rita
;
Mertens, Paul
;
Heyns, Marc
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1940
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Acq. date: 2025-12-15
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Metrics
Views
1940
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-15
Citations