Browsing by Author "Verhaegen, Fabian"
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Publication Double MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure range
Proceedings paper2017, 19th International Conference on Transducers, Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS, 18/06/2017, p.954-957Publication Micro-opto-mechanical pressure, sound, and ultrasound sensors in silicon-nitride photonic technology
Proceedings paper2019, European Conference on Integrated Optics - ECIO, 24/04/2019, p.1-3Publication Modelling and design of micro-opto-mechanical pressure sensors in the presence of residual stresses
Proceedings paper2017, 18th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and ... - IEEE EuroSime, 3/04/2017, p.1-5Publication Simulation and characterization of a high-sensitive micro-opto-mechanical microphone
Proceedings paper2018, 19th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics & Microsysystems - EuroSimE, 15/04/2018