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Simulation and characterization of a high-sensitive micro-opto-mechanical microphone
Publication:
Simulation and characterization of a high-sensitive micro-opto-mechanical microphone
Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gao, Hang
;
Huang, Chih Hsien
;
Westerveld, Wouter
;
Haouari, Rachid
;
Troia, Benedetto
;
Verhaegen, Fabian
;
Jansen, Roelof
;
Figeys, Bruno
;
Rottenberg, Xavier
;
Rochus, Veronique
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1920
since deposited on 2021-10-25
Acq. date: 2025-10-27
Citations
Metrics
Views
1920
since deposited on 2021-10-25
Acq. date: 2025-10-27
Citations