Publication:

Simulation and characterization of a high-sensitive micro-opto-mechanical microphone

Date

2018

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Huang, Chih Hsien

;

Westerveld, Wouter

;

Haouari, Rachid

;

Troia, Benedetto

;

Verhaegen, Fabian

;

;

;

Rottenberg, Xavier

;

Rochus, Veronique

Statistics

1924 since deposited on 2021-10-25

Acq. date: 2026-04-05