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Simulation and characterization of a high-sensitive micro-opto-mechanical microphone

Date

2018
Proceedings Paper
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dc.contributor.authorGao, Hang
dc.contributor.authorHuang, Chih Hsien
dc.contributor.authorWesterveld, Wouter
dc.contributor.authorHaouari, Rachid
dc.contributor.authorTroia, Benedetto
dc.contributor.authorVerhaegen, Fabian
dc.contributor.authorJansen, Roelof
dc.contributor.authorFigeys, Bruno
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorWesterveld, Wouter
dc.contributor.imecauthorHaouari, Rachid
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.date.accessioned2021-10-25T18:50:42Z
dc.date.available2021-10-25T18:50:42Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30739
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8369932/
dc.source.conference19th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics & Microsysystems - EuroSimE
dc.source.conferencedate15/04/2018
dc.source.conferencelocationToulouse France
dc.title

Simulation and characterization of a high-sensitive micro-opto-mechanical microphone

dc.typeProceedings paper
dspace.entity.typePublication
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