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Browsing by Author "Verheijden, G.J.A.M."

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    A feasibility study of dual damascene porous SiLK resin with spin-on hard masks

    Hoofman, Romano  
    ;
    Michelon, Julien
    ;
    Verheijden, G.J.A.M.
    ;
    Waeterloos, Joost
    ;
    Caluwaerts, Rudy  
    Proceedings paper
    2004, Advanced Metallization Conference 2003, 21/10/2003, p.147-151

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