Publication:

A feasibility study of dual damascene porous SiLK resin with spin-on hard masks

Date

2004

Proceedings Paper

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Files

9062.pdf 479.64 KB

Author(s)

Hoofman, Romano

;

Michelon, Julien

;

Verheijden, G.J.A.M.

;

Waeterloos, Joost

;

Caluwaerts, Rudy

;

;

Demeurisse, Caroline

;

Vandeweyer, Tom

;

Demuynck, Steven

;

;

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