A feasibility study of dual damascene porous SiLK resin with spin-on hard masks

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Author(s)

Hoofman, Romano

;

Michelon, Julien

;

Verheijden, G.J.A.M.

;

Waeterloos, Joost

;

Caluwaerts, Rudy

;

;

Demeurisse, Caroline

;

Vandeweyer, Tom

;

Demuynck, Steven

;

;

Metrics

1927 since deposited on 2021-10-15

Acq. date: 2025-12-09