Publication:

A feasibility study of dual damascene porous SiLK resin with spin-on hard masks

Date

2004
Proceedings Paper
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dc.contributor.authorHoofman, Romano
dc.contributor.authorMichelon, Julien
dc.contributor.authorVerheijden, G.J.A.M.
dc.contributor.authorWaeterloos, Joost
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorSchmidt, M.O.
dc.contributor.authorDemeurisse, Caroline
dc.contributor.authorVandeweyer, Tom
dc.contributor.authorDemuynck, Steven
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBeyer, Gerald
dc.contributor.imecauthorHoofman, Romano
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorDemeurisse, Caroline
dc.contributor.imecauthorVandeweyer, Tom
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecHoofman, Romano::0000-0001-8740-104X
dc.date.accessioned2021-10-15T13:53:53Z
dc.date.available2021-10-15T13:53:53Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9050
dc.source.beginpage147
dc.source.conferenceAdvanced Metallization Conference 2003
dc.source.conferencedate21/10/2003
dc.source.conferencelocationMontreal/Tokyo
dc.source.endpage151
dc.title

A feasibility study of dual damascene porous SiLK resin with spin-on hard masks

dc.typeProceedings paper
dspace.entity.typePublication
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