Browsing by Author "Verheyden, K."
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Publication Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability
Journal article2007, Microelectronic Engineering, (84) 11, p.2572-2574Publication Thermal stability of Pt and C-doped NiSi films
Proceedings paper2007, 15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP, 2/10/2007, p.145-149