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Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability
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Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vermont, P.G.
;
Pages, X.
;
Granneman, E.H.A.
;
Vanormelingen, Koen
;
Verheyden, K.
;
Mertens, Sofie
Journal
Microelectronic Engineering
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1885
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Acq. date: 2025-12-10
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Metrics
Views
1885
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-10
Citations