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Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability

Date

2007
Journal article
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dc.contributor.authorVermont, P.G.
dc.contributor.authorPages, X.
dc.contributor.authorGranneman, E.H.A.
dc.contributor.authorVanormelingen, Koen
dc.contributor.authorVerheyden, K.
dc.contributor.authorMertens, Sofie
dc.contributor.imecauthorMertens, Sofie
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.date.accessioned2021-10-16T21:27:06Z
dc.date.available2021-10-16T21:27:06Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13183
dc.source.beginpage2572
dc.source.endpage2574
dc.source.issue11
dc.source.journalMicroelectronic Engineering
dc.source.volume84
dc.title

Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability

dc.typeJournal article
dspace.entity.typePublication
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