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Browsing by Author "Verheyden, R."

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    Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies

    Eyben, Pierre  
    ;
    Mody, Jay
    ;
    Vemula, Sri Charan
    ;
    Koelling, Sebastian
    ;
    Verheyden, R.
    Oral presentation
    2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling

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