Browsing by Author "Verkleij, Dick"
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Publication LENS (Lithography Enhancement towards Nano Scale) a european project to support double exposure and double patterning technology development
;Cantu, Pietro ;Baldi, Livio ;Piacentini, Paolo ;Sytsma, JoostLe Gratiet, BernardProceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.764022