Browsing by Author "Vermeyen, Kenneth"
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Publication Cleaning of metal gate stacks for the sub 90nm technology node
Proceedings paper2004, Cleaning Technology in Semiconductor Device Manufacturing VIII. Proceedings of the International Symposium, 12/10/2003, p.393-399Publication Cleaning of metal gate stacks for the sub 90nm technology node
Meeting abstract2003, 204th Meeting of the Electrochemical Society: 8th Int. Symp. on CLeaning Technology in Semiconductor Device Manufacturing, 12/10/2003