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Browsing by Author "Verni, Giuseppe"

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    Dielectric on dielectric area-selective deposition by a combination of atomic layer deposition and organic film passivation for self-aligned via patterning

    Pasquali, Mattia  
    ;
    De Gendt, Stefan  
    ;
    Armini, Silvia  
    ;
    Illiberi, Andrea  
    ;
    Verni, Giuseppe
    Meeting abstract
    2018, ASD 2019, 4/04/2019, p.24-24

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