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Browsing by Author "Viitanan, Minna M."

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    Atomic layer deposition of hafnium oxide on germanium substrates

    Delabie, Annelies  
    ;
    Puurunen, R.
    ;
    Brijs, Bert
    ;
    Caymax, Matty  
    ;
    Conard, Thierry  
    ;
    Onsia, Bart  
    Journal article
    2005, J. Applied Physics, (97) 6, p.64104

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