Atomic layer deposition of hafnium oxide on germanium substrates

Simple item page Full metadata Statistics

Author(s)

Delabie, Annelies

;

;

;

;

Conard, Thierry

;

;

Richard, Olivier

;

Vandervorst, Wilfried

;

;

;

;

Viitanan, Minna M.

;

Brongersma, Hidde H.

;

;

;

Garfunkel, Eric

;

Gustafsson, Torgny

;

Journal

J. Applied Physics

Metrics

1995 since deposited on 2021-10-16

Acq. date: 2025-12-08