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    Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)

    van Spengen, Merlijn
    ;
    De Wolf, Ingrid  
    ;
    Puers, Bob  
    ;
    Vikhagen, E.
    Proceedings paper
    2001, Proceedings of the 27th International Symposium for Testing and Failure Analysis - ISTFA, 11/11/2001, p.357-364

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