Publication:
Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1853 since deposited on 2021-10-14
Acq. date: 2025-12-09
Citations
Metrics
Views
1853 since deposited on 2021-10-14
Acq. date: 2025-12-09
Citations