Publication:

Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)

Date

2001
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorPuers, Bob
dc.contributor.authorVikhagen, E.
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-14T18:08:40Z
dc.date.available2021-10-14T18:08:40Z
dc.date.embargo9999-12-31
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5758
dc.source.beginpage357
dc.source.conferenceProceedings of the 27th International Symposium for Testing and Failure Analysis - ISTFA
dc.source.conferencedate11/11/2001
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage364
dc.title

Optical imaging of high-frequency resonances and semi-static deformations in micro-electromechanical systems (MEMS)

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
5788.pdf
Size:
734.17 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions