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Browsing by Author "Villani, M. L."

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    Publication

    Integration issues in step and repeat UV nanoimprint lithography

    Charpin-Nicolle, C.
    ;
    Chiaroni, J.
    ;
    Le Cunff, Y.
    ;
    Denis, H.
    ;
    Rochat, N.
    ;
    Villani, M. L.
    ;
    Massin, J.
    Oral presentation
    2008, 34th International Conference on Micro and Nano Engineering

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