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Integration issues in step and repeat UV nanoimprint lithography
Publication:
Integration issues in step and repeat UV nanoimprint lithography
Date
2008
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Charpin-Nicolle, C.
;
Chiaroni, J.
;
Le Cunff, Y.
;
Denis, H.
;
Rochat, N.
;
Villani, M. L.
;
Massin, J.
;
Irmscher, M.
;
Vratzov, B.
;
van Hossen, H.
;
Gubbini, P.
;
Lorusso, Gian
;
Van Den Heuvel, Dieter
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1942
since deposited on 2021-10-17
428
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1942
since deposited on 2021-10-17
428
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations