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Browsing by Author "Vilquin, Bertrand"

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    Strategies for CMOS low equivalent oxide thickness achievement with high-k oxides grown on Si(001) by MBE

    Beccera, Loic
    ;
    Baboux, Nicolas
    ;
    Plossu, Carole
    ;
    Merckling, Clement  
    ;
    El-Kazzi, Mario
    Proceedings paper
    2008, Materials Science of High-k Dielectric Stackx - From Fundamentals to Technology, 24/03/2008, p.1073-H3-08

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