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Strategies for CMOS low equivalent oxide thickness achievement with high-k oxides grown on Si(001) by MBE
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Strategies for CMOS low equivalent oxide thickness achievement with high-k oxides grown on Si(001) by MBE
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Beccera, Loic
;
Baboux, Nicolas
;
Plossu, Carole
;
Merckling, Clement
;
El-Kazzi, Mario
;
Saint-Girons, Guillaume
;
Vilquin, Bertrand
;
Hollinger, Guy
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1968
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations
Metrics
Views
1968
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations