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Browsing by Author "Voogt, Frans"

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    The influence of TiN thickness and SiO2 formation method on the structural and electrical properties of TiN/HfO2/SiO2 gate stacks

    Vellianitis, Georgios  
    ;
    Van Dal, Mark  
    ;
    Boccardi, Guillaume  
    ;
    Duriez, Blandine  
    ;
    Voogt, Frans
    Journal article
    2009, IEEE Transactions on Electron Devices, (56) 7, p.1548-1553

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