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Browsing by Author "Voort, Pascal Van Der"

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    Publication

    Effect of the C-bridge length on the ultraviolet-resistance of oxycarbosilane low-k films

    Redzheb, Murad
    ;
    Prager, Lutz
    ;
    Naumov, Sergej
    ;
    Armini, Silvia  
    ;
    Voort, Pascal Van Der
    Journal article
    2016, Applied Physics Letters, (108) 1, p.12902
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    Gemini-templated PMO low-k films

    Redzheb, Murad
    ;
    Armini, Silvia  
    ;
    Okudur, Oguzhan Orkut  
    ;
    Vanstreels, Kris  
    ;
    Bernstorff, Sigrid
    Meeting abstract
    2016, Materials for Advanced Metallization, 20/03/2016

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