Publication:

Gemini-templated PMO low-k films

Date

2016

Meeting abstract

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Author(s)

;

;

Okudur, Oguzhan Orkut

;

Vanstreels, Kris

;

Bernstorff, Sigrid

;

Voort, Pascal Van Der

;

Baklanov, Mikhaïl

Statistics

1956 since deposited on 2021-10-23

Acq. date: 2026-03-16