Browsing by Author "Vorderwestner, M."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication 15nm-WFIN high-performance low-defectivity strained-germanium pFinFETs with low temperature STI-last process
Proceedings paper2014, Symposium on VLSI Technology, 9/06/2014, p.138-139