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Browsing by Author "Vorderwestner, M."

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    15nm-WFIN high-performance low-defectivity strained-germanium pFinFETs with low temperature STI-last process

    Mitard, Jerome  
    ;
    Witters, Liesbeth  
    ;
    Loo, Roger  
    ;
    Lee, Seung Hun
    ;
    Sun, J.W.
    ;
    Franco, Jacopo  
    Proceedings paper
    2014, Symposium on VLSI Technology, 9/06/2014, p.138-139

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