Publication:

15nm-WFIN high-performance low-defectivity strained-germanium pFinFETs with low temperature STI-last process

Date

2014
Proceedings Paper
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Author(s)

Mitard, Jerome
;
Witters, Liesbeth
;
Loo, Roger
;
Lee, Seung Hun
;
Sun, J.W.
;
Franco, Jacopo
;
Ragnarsson, Lars-Ake
;
Brand, A.
;
Lu, X.
;
Yoshido, N.
;
Eneman, Geert
;
Brunco, David
;
Vorderwestner, M.
;
Storck, P.
;
Milenin, Alexey
;
Hikavyy, Andriy
;
Waldron, Niamh
;
Favia, Paola
;
Vanhaeren, Danielle
;
Vanderheyden, Annelies
;
Richard, Olivier
;
Mertens, Hans
;
Arimura, Hiroaki
;
Sioncke, Sonja
;
Vrancken, Christa
;
Bender, Hugo
;
Eyben, Pierre
;
Barla, Kathy
;
Lee, Sun Ghil
;
Horiguchi, Naoto
;
Collaert, Nadine
;
Thean, Aaron

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