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Browsing by Author "Wagner, G."

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    Selective etching of SiGe for removal of dummy layers in fully silicided gate artchitectures

    Snow, Jim
    ;
    Vos, Rita  
    ;
    Kottantharayil, Anil
    ;
    Kraus, Harald
    ;
    Xu, Kaidong
    ;
    Grinninger, F.
    ;
    Wagner, G.
    Proceedings paper
    2005, Cleaning Technology in Semiconductor Device Manufacturing IX, 17/10/2005, p.207-213

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