Publication:
Selective etching of SiGe for removal of dummy layers in fully silicided gate artchitectures
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1883 since deposited on 2021-10-16
3last month
Acq. date: 2026-09-10
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Statistics
Views
1883 since deposited on 2021-10-16
3last month
Acq. date: 2026-09-10
Citations